Hydrogen markets

Semiconductor

Semiconductor processes employ active gases and a carrier gas stream containing high purity hydrogen to produce semiconductor devices. The carrier gas stream contains hydrogen that scavenges and reduces residual oxygen, protecting the devices from oxygen damage.  Hydrogen provides a safe, reliable, pure, cost effective, compressed gas that can be delivered at specific process pressures.

Applications

Annealing
Chemical vapor deposition
Extreme ultravolite lithography
Purifier regeneration
Protective atmosphere